Monday, November 13
PTB Berlin-Adlershof, Willy-Wien-Laboratory, Magnusstr. 9, 12489 Berlin
Due to administrative regulations on radiation protection you need to be registered prior to this event.
| 16:00 | Introduction: PTB in Adlershof MLS Lecture Hall |
| 16:20 | Lab Tour MLS Experimental Hall |
| 17:00 | Welcome Reception & Discussion MLS Lecture Hall |
Tuesday, November 14
PTB Berlin-Charlottenburg, Hermann-von-Helmholtz-Building, Abbestr. 2-12, 10587 Berlin
| 8:30 | Registration & Poster Set-up & Coffee |
| 9:30 | Opening and overview A. Gottwald, M. Kolbe, F. Scholze, PTB |
| 9:50 | Optics for EUV-Lithography with high NA H. Enkisch, CZ-SMT |
| Short Technical Break | |
Session I Chair: F. Scholze | |
| 10:40 | Actinic EUV Metrology and Materials Characterization for the EUV Era in imec's AttoLab K. M. Dorney, IMEC vzw |
| 11:00 | EUV coherent scattering for wafer metrology Y. Ekinci, PSI |
| 11:20 | Soft x-ray: novel metrology for 3D profilometry and device pitch overlay H.-K. Nienhuys, ASML |
| 11:40 | How does solid microanalysis profit from innovations in EUV research A. Winckelmann, BAM |
| 12:00 | Conference Photo |
| 12:10 | Lunch Break |
| 13:00 | Poster session & Sponsor Presentation |
Session II Chair: A. Gottwald | |
| 14:20 | SiC-based photodiode with shallow emitter for radiation measurements below 200nm N. Papathanasiou, sglux GmbH |
| 14:40 | Evaluation of a laboratory-based EUV scatterometer for nanoscale grating characterization L. M. Lohr, PTB |
| 15:00 | FUV coatings based an AlF3 films J. I. Larruquert, CSIC |
| 15:20 | Irradiation Systems for accelerated Testing of EUVL Components J. Vieker, ILT |
| 15:40 | Lab-based EUV spectroscopy : A guide from data acquisition to the reconstructed sample S. Glabisch, RWTH |
| 16:00 | Coffee Break |
| 16:30 | SPECIAL SESSION on 40 Years of Radiometry With Synchrotron Radiation at PTB |
| Welcome by the President of PTB C. Denz, PTB | |
| 40 Years of Metrology with Synchrotron Radiation at PTB M. Richter, PTB | |
| Towards A Materials Discovery Facility BESSY III B. Rech, HZB | |
| 18:00 | Get Together Reception and Buffet Dinner |
| 21:00 | End of Day 1 |
