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The seminar, the seventh in a series launched in 2011, is a forum for interdisciplinary exchange between basic and technology-oriented researchers and industrial users. The topics cover latest results from industrial applications of EUV radiation for lithography and measurement technology to developments for space-based VUV and EUV spectroscopy and the investigation of nano-structured surfaces.

Previous seminars: 201120132015, 2017, 2019 , 2021

Questions about further information may be addressed to: euv2023


13 November 2023 late afternoon: lab visit +)
+) Metrology Light Source, Berlin-Adlershof

14 - 15 November 2023 full day: oral and poster sessions
on-site in-person conference at PTB's historical site in Berlin Charlottenburg

14 November 2023 evening: Get-together-Dinner 


The meeting will take place in the Helmholtz-Building of the Berlin-Charlottenburg campus site of PTB (Abbestr. 2-12, 10587 Berlin). The historical PTB campus is located within walking distance from Kurfürstendamm and Bahnhof Zoologischer Garten, right in the heart of Berlin's 'City West'.

Confirmed invited speakers

Mark van de Kerkhof, ASML          Hartmut Enkisch, Zeiss SMT         Christina Porter, ASML         Kevin Dorney, imec

Maciej Bzowski, PAN CBK          Niklas Papathanasiou, SGLUX          Torsten Feigl, optiX fab.           Kuljit Virk, KLA

Supported by

If you are interested in sponsoring this event, please use the contact link to let us know.