The seminar, the seventh in a series launched in 2011, is a forum for interdisciplinary exchange between basic and technology-oriented researchers and industrial users. The topics cover latest results from industrial applications of EUV radiation for lithography and measurement technology to developments for space-based VUV and EUV spectroscopy and the investigation of nano-structured surfaces.
Questions about further information may be addressed to: euv2023
The meeting will take place in the Helmholtz-Building of the Berlin-Charlottenburg campus site of PTB (Abbestr. 2-12, 10587 Berlin). The historical PTB campus is located within walking distance from Kurfürstendamm and Bahnhof Zoologischer Garten, right in the heart of Berlin's 'City West'.
Mark van de Kerkhof, ASML Hartmut Enkisch, Zeiss SMT Christina Porter, ASML Kevin Dorney, imec
Maciej Bzowski, PAN CBK Niklas Papathanasiou, SGLUX Torsten Feigl, optiX fab. Kuljit Virk, KLA
If you are interested in sponsoring this event, please use the contact link to let us know.