Important dates
| 322. PTB Seminar VUV and EUV Metrology "EUV2023" | November 14-15, 2023 |
| Call for abstracts | End of April 2023 |
| Abstract submission closed EUV2023 abstract template | |
| Final programme | October 2023 |
| Start of registration Registration deadline | July 2023 October 15, 2023 |